关键词: 微波等离子体, 蚀刻, 杉木, 影响因素

Abstract:

Microwave plasma represents rather reactive media, so ablation will take place from wood surface in contact with microwave plasma. The ablation depends upon the energy of the reactive species, which in turn depend upon the nature of gas used and the treatment conditions. The ablation verity of wood (Chinese fir) sample in different treatment conditions, including location of sample in the reactor, time of treatment, electrical power used, gas pressure and different gas, including N₂, O₂ and air, has been investigated. The result shows that the location of sample to resonance cavity is the strongest affecting and factor followed by treating time, microwave energy level and gas pressure. Shorting distance of sample to resonance cavity, prolonging treatment time and increasing microwave energy level will result in ablation increasing. Oxygen is most effective on the action of ablation, followed by nitrogen and air.

Key words: Microwave plasma, Ablation, Chinese fir, Affecting factors